Mykrolis FM-380 SAV 500 PSIG MAX 20 SLPM AIR Mass Flow Meter

The Mykrolis FM-380 SAV Mass Flow Meter is a rugged gas‑flow measuring device designed to monitor air flow in process lines up to 500 psig, with a maximum air full‑scale of 20 SLPM; it provides a 0–5 VDC output proportional to flow and typically runs from a ±15 V supply (flow meters use +15 V and −15 V rails). Built for cleanroom and semiconductor environments, it uses materials such as 316 stainless steel, 446 stainless steel, and PFA Teflon, with elastomer seals in Viton, Kalrez, and Neoprene, and it ships with standard 1/4" Swagelok fittings. In catalog listings for the FM380 family, full‑scale ranges span roughly from 10 sccm to 30 SLPM (for N2), while the air version is specified up to 20 SLPM, with performance specs including ±1% of full scale accuracy, ±0.5% of full scale linearity, ±0.2% of full scale repeatability, attitude sensitivity under 0.25% at 90 degrees, and a temperature coefficient of ±0.1%/°C full scale; a pressure coefficient of 0.007%/psi full scale is specified, reflecting stable readings across operating pressures. The device is part of the FM380/FM380SA family, commonly used in semiconductor gas delivery and analytical gas systems where precise mass‑flow measurement is essential.