The MKS Instruments 1559A1512LR1BV 02 100SLM Mass Flow Controller delivers precise gas-flow control up to 100 standard liters per minute, enabling repeatable delivery in systems that require stable process conditions. As a mass flow controller, it meters and regulates gas flow with fast response and high accuracy to maintain consistent operating parameters. The model designation 1559A1512LR1BV 02 100SLM identifies this unit and its nominal flow capacity for integration into your instrumentation setup.
