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Aerotech ATS100-50-U-20P Linear Ball Screw Actuator

Aerotech ATS100-50-U-20P Linear Ball Screw Actuator

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Description:

The Aerotech ATS100-50-U-20P Linear Ball Screw Actuator is a motorized, screw-driven positioning stage in Aerotech’s ATS100 family that delivers 50 mm of travel with a 2 mm lead for precise, repeatable single-axis motion. Constructed with an aluminum body and a clear anodized finish, it uses a precision-ground ball screw and bearing stack, and includes bellows-type waycovers to protect the drive system in dirty environments. The base unit weighs about 1.6 kg, and with the included motor and encoder the assembly runs around 2.7 kg. Performance specs for the 50 mm travel variant include a maximum speed of 100 mm/s, horizontal payload up to 25 kg, vertical payload up to 10 kg (side loading also 10 kg), and calibrated positional accuracy of ±0.5 µm (standard ±8 µm) with repeatability of ±0.3 µm calibrated (±0.7 µm standard). Straightness and flatness are typically around 1.0–3.0 µm, and pitch/yaw errors are in the low-arcsecond range (about 5 arc seconds). The ATS100 series is designed for single-axis systems and is commonly paired with Aerotech controllers and drives (including BMS brushless rotary motors or other Aerotech motor families). Typical applications include semiconductor wafer testing and fabrication, precision microscope inspection, and high-precision micromachining, where compact form factor, high stiffness, and sub-micron to micron-scale positioning are required. This model variant is the 50 mm travel option configured with a 2 mm lead and an integrated motor/encoder package, suitable for users needing a compact, high-precision linear stage with ready-to-run capability.

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